Field Emission
Scanning Electron Microscope
SEM5000
CIQTEK SEM5000 is a high-resolution, feature-rich field emission scanning electron microscope (FE-SEM).
Advanced column design, high voltage tunneling technology (SuperTunnel), low aberration non-leakage magnetic objective lens design, to achieve low-voltage high-resolution imaging, while magnetic samples can be applied. Optical navigation, advanced automatic functions, well-designed human-machine interaction, and optimized operation.
Whether experienced or not, one can quickly get started with high-resolution shooting tasks.
Electron Gun
High-brightness Schottky
Field Emission Electron Gun
Resolution
1.0 nm @ 15 kV
1.5 nm @ 1 kV
Magnification
1 ~ 2,500,000 x
Acceleration Voltage
20 V ~ 30 kV
Sample Table
Five-axis automatic sample table
Features
01
High-resolution imaging at low accelerating voltage.
02
The electromagnetic compound mirror reduces aberrations, significantly improves resolution at low voltages, and allows observation of magnetic samples.
03
High-pressure tunneling technology (SuperTunnel), where the electrons in the tunnel can maintain high energy, reducing space charge effects and ensuring low voltage resolution.
04
The electronic optical path without crossover effectively reduces system aberration and improves resolution.
05
Water-cooled constant temperature objective lens, to ensure the stability, reliability, and repeatability of the objective lens work.
06
Magnetic deflection six-hole adjustable diaphragm, automatic switching diaphragm hole, no mechanical adjustment, to achieve high-resolution observation or large beam analysis mode fast switching.
Applications
Applications
Parameters
| Key Parameters | Resolution |
1.0 nm @ 15 kV, SE 0.8 nm @ 30 kV, STEM |
| Acceleration voltage | 20 V ~ 30 kV | |
| Magnification | 1 ~ 2,500,000 x | |
| Electron Gun | High brightness Schottky Field Emission Electron Gun | |
| Sample Chamber | Vacuum System | Fully automatic control, oil-free vacuum system |
| Camera | Dual Cameras (Optical navigation + in-bin monitor) |
|
| Distance | X: 120 mm, Y: 115 mm, Z: 50 mm T: -10°～ +90°, R: 360° (*Optional extra-large bin version available) |
|
| Detectors and Extensions | Standard | The high-angle electronic detector in the lens column The side low-angle electronic detector |
| Optional |
Flush-mounted mid-angle backscattered electron detector Trackball & Knob Control Panel |
|
| Software | Operating System | Windows |
| Navigation | Optical Navigation, Gesture Quick Navigation | |
| Automatic Functions | Auto Brightness Contrast, Auto Focus, Automatic Dissipation |
