Field Emission Scanning Electron Microscope | SEM5000

Field Emission
Scanning Electron Microscope
SEM5000

CIQTEK SEM5000 is a high-resolution, feature-rich field emission scanning electron microscope (FE-SEM, FEG SEM).
Advanced column design, high voltage tunneling technology (SuperTunnel), low aberration non-leakage magnetic objective lens design, to achieve low-voltage high-resolution imaging, while magnetic samples can be applied. Optical navigation, advanced automatic functions, well-designed human-machine interaction, and optimized operation.
Whether experienced or not, one can quickly get started with high-resolution shooting tasks.

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Electron Gun

High-brightness Schottky
Field Emission Electron Gun

Resolution

1.0 nm @ 15 kV
1.5 nm @ 1 kV

Magnification

1 ~ 2,500,000 x

Acceleration Voltage

20 V ~ 30 kV

Sample Table

Five-axis automatic sample table

Features

01

High-resolution imaging at low accelerating voltage.

02

The electromagnetic compound mirror reduces aberrations, significantly improves resolution at low voltages, and allows observation of magnetic samples.

03

High-pressure tunneling technology (SuperTunnel), where the electrons in the tunnel can maintain high energy, reducing space charge effects and ensuring low voltage resolution.

04

The electronic optical path without crossover effectively reduces system aberration and improves resolution.

05

Water-cooled constant temperature objective lens, to ensure the stability, reliability, and repeatability of the objective lens work.

06

Magnetic deflection six-hole adjustable diaphragm, automatic switching diaphragm hole, no mechanical adjustment, to achieve high-resolution observation or large beam analysis mode fast switching.

Applications

Parameters

Key Parameters	Resolution	1.0 nm @ 15 kV, SE 1.5 nm @ 1 kV, SE 0.8 nm @ 30 kV, STEM
	Acceleration voltage	20 V ~ 30 kV
	Magnification	1 ~ 2,500,000 x
	Electron Gun	High brightness Schottky Field Emission Electron Gun
Sample Chamber	Vacuum System	Fully automatic control, oil-free vacuum system
	Camera	Dual Cameras (Optical navigation + in-bin monitor)
	Distance	X: 120 mm, Y: 115 mm, Z: 50 mm T: -10°～ +90°, R: 360° (*Optional extra-large bin version available)
Detectors and Extensions	Standard	The high-angle electronic detector in the lens column The side low-angle electronic detector
Detectors and Extensions	Optional	Flush-mounted mid-angle backscattered electron detector Automatic retractable scanning transmission electron microscopy (STEM) detector Sample exchange chamber High-speed beam gate and electron beam exposure Energy dispersive spectroscopy (EDS/EDX) Electron Backscatter Diffraction (EBSD) Electron-beam-induced current (EBIC) Cathodoluminescence (CL) High and low temperature in-situ stretching table nanoManipulator Large-Scale Image Stitching Trackball & Knob Control Panel
Software	Operating System	Windows
	Navigation	Optical Navigation, Gesture Quick Navigation
	Automatic Functions	Auto Brightness Contrast, Auto Focus, Automatic Dissipation