SEM5000

Field Emission
Scanning Electron Microscope
SEM5000

 

CIQTEK SEM5000 is a high-resolution, feature-rich field emission scanning electron microscope (FE-SEM, FEG SEM).
Advanced column design, high voltage tunneling technology (SuperTunnel), low aberration non-leakage magnetic objective lens design, to achieve low-voltage high-resolution imaging, while magnetic samples can be applied. Optical navigation, advanced automatic functions, well-designed human-machine interaction, and optimized operation.
Whether experienced or not, one can quickly get started with high-resolution shooting tasks.

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Electron Gun

High-brightness Schottky
Field Emission Electron Gun

Resolution

1.0 nm @ 15 kV
1.5 nm @ 1 kV

Magnification

1 ~ 2,500,000 x

Acceleration Voltage

20 V ~ 30 kV

Sample Table

Five-axis automatic sample table

Features

01

High-resolution imaging at low accelerating voltage.

02

The electromagnetic compound mirror reduces aberrations, significantly improves resolution at low voltages, and allows observation of magnetic samples.

03

High-pressure tunneling technology (SuperTunnel), where the electrons in the tunnel can maintain high energy, reducing space charge effects and ensuring low voltage resolution.

04

The electronic optical path without crossover effectively reduces system aberration and improves resolution.

05

Water-cooled constant temperature objective lens, to ensure the stability, reliability, and repeatability of the objective lens work.

06

Magnetic deflection six-hole adjustable diaphragm, automatic switching diaphragm hole, no mechanical adjustment, to achieve high-resolution observation or large beam analysis mode fast switching.

Applications

Applications

sem5000-Lithium sem5000-Chip-Semiconductor sem5000-Ceramics sem5000-Construction-Materials sem5000-Electronic-Components sem5000-Chemicals sem5000-Biomedical sem5000-Environment sem5000-Metal-Materials sem5000-More-Fields
sem5000-Lithium sem5000-Chip-Semiconductor sem5000-Ceramics sem5000-Construction-Materials sem5000-Electronic-Components sem5000-Chemicals sem5000-Biomedical sem5000-Environment sem5000-Metal-Materials

Parameters

Key Parameters Resolution

1.0 nm @ 15 kV, SE
1.5 nm @ 1 kV, SE

0.8 nm @ 30 kV, STEM

Acceleration voltage 20 V ~ 30 kV
Magnification 1 ~ 2,500,000 x
Electron Gun High brightness Schottky Field Emission Electron Gun
Sample Chamber Vacuum System Fully automatic control, oil-free vacuum system
Camera Dual Cameras
(Optical navigation + in-bin monitor)
Distance X: 120 mm, Y: 115 mm, Z: 50 mm
T: -10°~ +90°, R: 360°
(*Optional extra-large bin version available)
Detectors and Extensions Standard The high-angle electronic detector in the lens column
The side low-angle electronic detector
Optional

Flush-mounted mid-angle backscattered electron detector
Automatic retractable scanning transmission electron microscopy (STEM) detector
Sample exchange chamber
High-speed beam gate and electron beam exposure
Energy dispersive spectroscopy (EDS/EDX)
Electron Backscatter Diffraction (EBSD)
Electron-beam-induced current (EBIC)
Cathodoluminescence (CL)
High and low temperature in-situ stretching table
nanoManipulator
Large-Scale Image Stitching

Trackball & Knob Control Panel

Software Operating System Windows
Navigation Optical Navigation, Gesture Quick Navigation
Automatic Functions Auto Brightness Contrast, Auto Focus, Automatic Dissipation
sem5000

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